MEC554

Course Description

This course introduces the fundamental engineering knowledge of MEMS (Microelectromechanical Systems). The students will also learn about the nano-materials and smart materials and their operation characteristics and limitations. In this course fabrication technique of the MEMS components is provided with concentration on the key components including actuation transducers and microfluidic chips. The students will be expected to employ the course knowledge by participating in design project of MEMS system

Course Details